Solid immersion lens applications for nanophotonic devices
نویسندگان
چکیده
منابع مشابه
Subwavelength-size solid immersion lens.
We report on the fabrication and characterization of nanoscale solid immersion lenses (nano-SILs) with sizes down to a subwavelength range. Submicrometer-scale cylinders fabricated by electron-beam lithography are thermally reflowed to form a spherical shape. Subsequent soft lithography leads to nano-SILs on transparent substrates for optical characterization. The optical characterization is pe...
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This paper reviews recent work in the area of silicon photonic devices and circuits for monolithic and heterogeneous integration of circuits and systems on a chip. In this context, it presents fabrication results for producing low-loss silicon waveguides without etching. Resonators and add-drop distributed filters utilizing sidewall modulation fabricated in a single lithography and etching step...
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We report imaging in the infrared with a microfabricated solid immersion lens. The integrated 15-mm-diameter lens and cantilever are fabricated from single-crystal silicon and scanned in contact with a sample to obtain an image. We demonstrate a focused spot size of l/5 and an effective numerical aperture of 2.5 with l59.3 mm light. The total power transmitted through the lens is a factor of 10...
متن کاملAdvanced optical characterization of micro solid immersion lens
We report on the advanced optical characterizations of microfabricated solid immersion lenses with 2-μm diameter, operating at λ = 642 nm. The main feature, the spot size reduction, has been investigated by applying a focused Gaussian beam of NA = 0.9. Particular illuminating beams, e.g., Bessel-Gauss beams of the zeroth and the first order, a doughnutshape beam and its decompositions, i.e. two...
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ژورنال
عنوان ژورنال: Journal of Nanophotonics
سال: 2008
ISSN: 1934-2608
DOI: 10.1117/1.3068652